MICROACELERÓMETRO MEMS, DISEÑO, ANÁLISIS ESTRUCTURAL Y ELECTROSTÁTICO (MEMS MICROACCELEROMETER, DESIGN, STRUCTURAL AND ELECTROSTATIC)
Resumen
En ese trabajo se describe el diseñó de un microacelerómetro de bajo consumo de potencia con tecnología MEMS; se obtuvo un microacelerómetro de 159 μm x 109 μm. Se realizó un mesh por el método de elementos finitos, para su análisis estructural y electrostático, esto con el software COMSOL MULTIPHYSICS 5.1, para comprobar su eficiencia y buen funcionamiento. Debido a que es un sensor de movimiento inercial tipo capacitivo, su principal aplicación es en los disparadores de bolsas de aire de automóviles; el cual podría impactar en la industria automotriz y de consumo.
This paper describes the design of a low power consumption micro-accelerometer with MEMS technology; the dimensions of microaccelerometer computed were 159 μm x 109 μm, a mesh was obtained by the finite element method, for its structural and electrostatic analysis, this with the COMSOL MULTIPHYSICS 5.1 software, to verify its efficiency and good performance. The main application of microaccelerometers is in automobile airbag triggers, which could impact the automotive and consumer industries.
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